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Specifications:Ultimate vacuum 6.6X10-5Pa
Deposition chamber
Spherical chamber ID50mm ;With valve for replacing sample;
incidence laser windows; sample holder and others flange interface
Sample holder
Size of the sample is 2- inch,
The antioxidative heating elements can be used in a long time at the temperature of 800degree celsius under oxygen atmosphere.the temperature precision is more or less 1degree celsius and it is rotational at a 0-30rpm/min adjustable speed ,
Four position for laser target
There are four targets materials in the system , the size of each is 2 Inch;
Each of the targets materials can be revolved to match a precision sputtering position.
Rotation is at a adjustable speed rang of 0-30rpm/min; Rotation and Revolution are based on step motor dirve.
Gas circuits Mass flowmeter is used
PLD pulsed laser deposition system
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